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Full name: 
Mark G Allen
Job title: 
Adjunct Professor
Email address: 
Work phone: 
MiRC 120

Mark G. Allen received three bachelor degrees from the University of Pennsylvania in 1983: the B.A. in Chemistry, the B.S.E. in Chemical Engineering, and the B.S.E. in Electrical Engineering. He then attended the Massachusetts Institute of Technology, where he received the S.M. degree in Chemical Engineering and the Ph.D. degree in the field of microelectronics in 1986 and 1989, respectively. After completing a postdoctoral appointment at MIT, Dr. Allen joined Georgia Tech as an assistant professor in 1989.

His main research focus is in microelectromechanical systems (MEMS), which uses microfabrication techniques to create mechanical structures in silicon and other materials that can be added to electronic devices. A key participant in the Microelectronics Research Center and the Microsystems Packaging Research Center, Dr. Allen also serves as a co-director for the Center for MEMS and Microsystems Technologies. He leads the Microsensor and Microactuator Group at Georgia Tech, where he has advised 17 postdoctoral fellows and has graduated 27 Ph.D. students. During his career, he has published almost 90 refereed journal papers and 165 refereed conference papers.

To date, Dr. Allen and his research group have been issued 36 patents, two of which have led to the development of two companies—Redeon and CardioMEMS—that are graduates of the Advanced Technology Development Center. In 1999, Dr. Allen and his colleague Mark Prausnitz of the School of Chemical and Biomolecular Engineering co-founded Redeon, a microneedle company that commercialized microfabrication-based approaches to transdermal delivery of drugs such as insulin. The company was sold to Biovalve, Inc., in 2001. Dr. Allen co-founded his second company, CardioMEMS, with Jay Yadav, MD, of the Cleveland Clinic in 2001, to create endovascularly-implantable wireless MEMS sensors for monitoring physiological conditions within the body. The first devices developed were pressure sensors for monitoring the intrasac pressure in abdominal aortic aneurysms that have been repaired using stent-grafts. CardioMEMS' wireless pressure monitor was recently highlighted by the U.S. Food and Drug Administration in its annual report as a medical device likely to have a significant impact on patient care.

In August 2007, Dr. Allen was named as the senior vice provost for research and innovation at Georgia Tech. He is responsible for setting the Institute's research and economic development agenda and strategic direction, including the commercialization of intellectual property developed in its research labs.

Research interests: 
  • Micromachining
  • Microsensor and microactuator fabrication compatible with the IC fabrication
  • Microelectromechanical systems (MEMS)
  • International Conference on Solid State Sensors and Actuators Steering Committee, 2007-2015
  • Board Member, Transducers Research Foundation, 2004-2010
  • 2007 American Electronics Association Spirit of Endeavor Award
  • 2006 Company of the Year Award from Small Times Magazine for CardioMEMS
  • 2006 Frost and Sullivan Patient Monitoring Product Innovation of the Year Award for CardioMEMS
  • 2005 Georgia Tech Outstanding Leadership for the Development of Graduate Research Assistants Award
  • Senior Member, IEEE

J. Joy, J. Kroh, M. Ellis, M.G. Allen, and W. Pyle, "Communicating with Implanted Wireless Sensor," U.S. Patent 7,245,117, issued July 2007.

S. Rajaraman, M.A. McClain, S.-O. Choi, J.D. Ross, S.P. DeWeerth, M.C. LaPlaca, and M.G. Allen, "Three-Dimensional Metal Transfer Micromolded Microelectrode Arrays for In-Vitro Brain Slice Recordings," Proc. 14th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers '07), Lyon, France, June 2007.

M.R. Prausnitz, M.G. Allen, and I.-J. Gujral, "Microneedle drug delivery device," U.S. Patent 7,226,439, issued June 2007.

X. Wu, H. Zhu, and M.G. Allen, "A Pneumatically Actuated Endoskeletal Microbubble Array as a Refreshable Braille Cell," Proc. 14th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers '07), Lyon, France, June 2007.

P. Galle, X. Wu, L. Milner, S.-H. Kim, P. Johnson, P. Smeys, P. Hopper, K. Hwang, and M.G. Allen, "Ultra-Compact Power Conversion Based on a CMOS-Compatible Microfabricated Power Inductor With Minimized Core Losses," Proc. 57th IEEE Electronic Components and Technology Conference, Reno, NV, May 2007.

Y. Zhao, Y.-K. Yoon, and M.G. Allen, "Metal-Transfer-Micromolded RF Components for System-On-Package (SOP)," Proc. 57th IEEE Electronic Components and Technology Conference, Reno, NV, May 2007.

M.G. Allen, Y.K. Yoon, J.W. Park, Y.H. Joung, F. Cros, I. Papapolymerou, E. Tentzeris, and B. Pan, "Surface Micromachined Millimeter-Scale RF System and Method," U.S. Patent 7,196,666, issued March 27, 2007.

S. Rajaraman, S.-O. Choi, R. H. Shafer, J. D. Ross, J. Vukasinovic, Y. Choi, S.P. DeWeerth, A. Glezer, and M.G. Allen., "Microfabrication technologies for a coupled three-dimensional microelectrode, microfluidic array," Journal of Micromechanics and Microengineering, vol. 17, no. 1, pp. 163-71 (2007).

M.G. Allen, M. Fonseca, J. White, J.Kroh, and D. Stern, "High Q-Factor Sensor," U.S. Patent 7,147,604, issued December 12, 2006.

D.J. Coe, M.G. Allen, C.S. Rinehart, and A. Glezer, "Pneumatically actuated micromachined synthetic jet modulators," Sensors and Actuators A (Physical), vol. 132, no. 2, pp. 689-700, 2006.

Y. Wang, G. Yuan, Y.-K. Yoon, M.G. Allen, and S.A. Bidstrup, "Optimization of synthetic jet fluidic structures in printed wiring boards," Transactions of the ASME, Journal of Electronic Packaging, vol. 128, no. 4, pp. 353-9, 2006.

B. Pan, Y.-K. Yoon, G.E. Ponchak, M.G. Allen, J. Papapolymerou, and M.M. Tentzeris, "Analysis and Characterization of a High-Performance Ka-Band Surface Micromachined Elevated Patch Antenna," Antennas and Wireless Propagation Letters, vol. 5, issue 1, pp. 511-514, 2006.

Last revised August 28, 2020

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