ECE Course Outline

ECE6229

Introduction to MEMS (2-3-3)

Prerequisites
None
Corequisites
None
Catalog Description
Introduction to Micro-Electro-Mechanical systems: Microfabrication techniques including: photolithography, etching, physical and chemical vapor deposition, electroplating, bonding and polymer processing. Application to sensors and actuators. Credit not allowed for both ECE 6229 and ME 6229 or CHBE 6229.
Textbook(s)
M.J. Madou, Fundamentals of Microfabrication (2nd edition), CRC Press, 2002. ISBN 978-0849308260 (required)

G.T. Kovacs, Micromachined Transducers Sourcebook (1st edition), McGraw-Hill, 1998. ISBN 0072907223, ISBN 978-0072907223 (required)

S.D. Senturia, Microsystem Design (1st edition), Kluwer, 2000. ISBN 0792372468, ISBN 978-0792372462 (required)

Topical Outline