ECE Course Outline
Integrated Circuit Fabrication (2-3-3)
- (ECE 3030 [min C] or ECE 3040 [min C]) and ECE 2031 [min C]
- Catalog Description
- Introduction to microelectronic processing technologies and CMOS. Includes a laboratory for fabrication/testing of MOS transistors, basic CMOS circuits, integrated resistors and capacitors.
- No Textbook Specified.
- Course Objectives - As part of this course, students:
- learn the basic fabrication processes used to fabricate integrated circuits. [c]
- attain hands-on experience in fabricated integrated circuits & devices and characterizing the resulting electronic circuit. [b, k]
- engage in formal written communication exercises including laboratory reports and design projects. [g]
- learn how to correlate non-ideal integrated circuit operation back to the fabrication process used to manufacture the device under test. [a, e]
- learn how to model integrated circuits based on processing parameters. [a, e]
- learn how to modify integrated circuit fabrication processes to improve device performance. [c, e]
- Course Outcomes - Upon successful completion of this course, students should be able to:
- fabricate CMOS circuitry using a basic CMOS manufacturing procedure.
- perform common fabrication processes used in microelectronics fabrication.
- test integrated circuits and interpret non-ideal behaviors.
- correlate non-ideal IC behavior back to the processes used to fabricate the device under test.
- model IC physical parameters such as junction depth, dopant concentration and modify fabrication process flow designs to improve device performance
- write technical reports related to the laboratory experiences, integrated circuit characterization, and a process design project.
- compile a Process Design Project including analyzing non-ideal performance of fabricated ICs, developing a process flow to improve performance.
- Topical Outline
Introduction, Safety, and Semiconductor Materials Crystallography Oxidation Photolithography Diffusion Wet Etching Tech Plasma Processing Metallization Ion Implantation CVD Processes MEMS Processes Integration