Integrated Circuit Fabrication

(2-0-3-3)

CMPE Degree: This course is Elective for the CMPE degree.

EE Degree: This course is Selected Elective for the EE degree.

Lab Hours: 3 supervised lab hours and 0 unsupervised lab hours.

Technical Interest Group(s) / Course Type(s): Courses for non-ECE majors, Nanotechnology

Course Coordinator: Albert B Frazier

Prerequisites: (ECE 3030 [min C] or ECE 3040 [min C]) and ECE 2031 [min C]

Catalog Description

Introduction to microelectronic processing technologies and CMOS. Includes a laboratory for fabrication/testing of MOS transistors, basic CMOS circuits, integrated resistors and capacitors.

Textbook(s)

Course Outcomes

  1. Fabricate CMOS circuitry using a basic CMOS manufacturing procedure.
  2. Perform common fabrication processes used in microelectronics fabrication.
  3. Test integrated circuits and interpret non-ideal behaviors.
  4. Correlate non-ideal IC behavior back to the processes used to fabricate the device under test.
  5. Model IC physical parameters such as junction depth, dopant concentration and modify fabrication process flow designs to improve device performance
  6. Write technical reports related to the laboratory experiences, integrated circuit characterization, and a process design project.
  7. Compile a Process Design Project including analyzing non-ideal performance of fabricated ICs, developing a process flow to improve performance.

Strategic Performance Indicators (SPIs)

Not Applicable

Topical Outline

Introduction, Safety, and Semiconductor Materials

Crystallography

Oxidation

Photolithography

Diffusion

Wet Etching Tech

Plasma Processing

Metallization

Ion Implantation

CVD Processes

MEMS Processes

Integration