Integrated Circuit Fabrication
(2-0-3-3)
CMPE Degree: This course is Selected Elective for the CMPE degree.
EE Degree: This course is Selected Elective for the EE degree.
Lab Hours: 3 supervised lab hours and 0 unsupervised lab hours.
Technical Interest Groups / Course Categories: Threads / ECE Electives
Course Coordinator:
Prerequisites: ECE 2031 [min C] and (ECE 3030 [min C] or ECE 3040 [min C])
Catalog Description
Introduction to microelectronic processing technologies and CMOS. Includes a laboratory for fabrication/testing of MOS transistors, basic CMOS circuits, integrated resistors and capacitors.Textbook(s)
Course Outcomes
Fabricate CMOS circuitry using a basic CMOS manufacturing procedure.
Perform common fabrication processes used in microelectronics fabrication.
Test integrated circuits and interpret non-ideal behaviors.
Correlate non-ideal IC behavior back to the processes used to fabricate the device under test.
Model IC physical parameters such as junction depth, dopant concentration and modify fabrication process flow designs to improve device performance
Write technical reports related to the laboratory experiences, integrated circuit characterization, and a process design project.
Compile a Process Design Project including analyzing non-ideal performance of fabricated ICs, developing a process flow to improve performance.
Strategic Performance Indicators (SPIs)
N/A
Topic List
- Introduction, Safety, and Semiconductor Materials
- Crystallography
- Oxidation
- Photolithography
- Diffusion
- Wet Etching Tech
- Plasma Processing
- Metallization
- Ion Implantation
- CVD Processes
- MEMS Processes
- Integration