ECE Course Outline

ECE6455

Semiconductor Process Control (3-0-3)

Prerequisites
CEE/ISYE/MATH 3770
Corequisites
None
Catalog Description
This course is designed to explore methods of applying statistical process control and statistical quality control to semiconductor manufacturing processes. Students will be required to complete a design project.
Textbook(s)
May, Spanos, Fundamentals of Semiconductor Manufacturing and Process Control, John Wiley, 2006. ISBN 9780471784067 (required)

Montgomery, Introduction to Statistical Quality Control (6th edition), John Wiley, 2008. ISBN 9780470169926 (required)

Topical Outline
1. Relevant Statistical Distributions in Semiconductor Manufacturing
2. Sampling and Estimation
3. Hypothesis Testing
4. Attribute Control Charts for Defect Control
5. Variable Control Charts for Process Control
6. Advanced Control Charts (CUSUM, EWMA, Multivariate)
7. Time-Series Modeling of In-Situ Sensor Data
8. Experimental Design Methods for Characterizing IC Fabrication Processes
9. Analyzing Experimental Results
10. Statistical Software Packages
11. Analysis of Process Variation Using Principal Components 
12. Response Surface Modeling of Unit Processes
13. Integrated Circuit Design for Manufacturability
14. Parametric and Catastrophic IC Yield Modeling