ECE Course Outline


Introduction to Microelectronics Technology (3-0-3)

Catalog Description
Presents the fundamentals of microelectronics material, device, and circuit fabrication
Campbell, Fabrication Engineering at the Micro and Nanoscale (4th edition), Oxford University Press, 2012. ISBN 9780199861224 (required)

Topical Outline
I.  Hot Processing and Ion Implantation
    A.  Diffusion
    B.  Thermal oxidation
    C.  Ion implantation
    D.  Rapid thermal processing

II.  Pattern Transfer
    A. Optical lithography
    B.  Photoresists
    C.  E-beam and x-ray lithography
    D.  Vacuum science and plasma
    E.  Etching

III.  Thin Films
    A.  Deposition:  evaporation and sputtering
    B.  Chemical vapor deposition
    C.  Epitaxial growth

IV.  Characterization
    A.  Electrical (Hall, CV, IV, etc.)
    B.  Structural (x-ray, TEM, SEM, etc.)
    C.  Optical (photoluminscence, absorption, etc.)

V.  Process Control and Circuit Fabrication
    A.  Process simulation tools and process monitoring
    B.  Yield and reliability
    C.  Integration
    D.  Packaging