ECE Course Outline

ECE6422

Interface IC Design for MEMS and Sensors (3-0-3)

Prerequisites
ECE 4430
Corequisites
None
Catalog Description
Design of high-performance integrated interface circuits for various MEMS and sensing devices. System level issues in integrated microsystems.
Textbook(s)
Gray, Hurst, Lewis, & Meyer, Analysis and Design of Analog Integrated Circuits (4th edition), Wiley, 2004. ISBN 9780471321682 (required)

S. D. Senturia, Microsystem Design (2005 edition), Kluwer. ISBN 9780792372462 (required)

Baltes, Brand, Fedder, Hierold, Kowenk, Tabata, Advanced Micro and Nanosystems, Vol. 1, Enabling Technology for MEMS and Nanodevices, Wiley-VCH, 2004. ISBN 9783527307463(optional)

R. J. Baker, CMOS Mixed-Signal Circuit Design, Wiley, 2002. ISBN 9780471227540(optional)

G. Rebeiz, RF MEMS: Theory, Design and Technology, Wiley, 2003. ISBN 9780471201694(optional)

Topical Outline
Review of Integrated MEMS Technologies and Applications
1. Integrated MEMS Applications: Microsensors, Microactuators, RF, and Biomedical
2. Integrated MEMS Processes and schemes: System-On-Chip, and System-On/In-Package
3. Bulk Micromachining Processes (low and high temperature)
4. Surface Micromachining Processes (low and high temperature)
5. Mixed-Mode Micromachining Processes
6. Integrated MEMS-CMOS Processes
7. MEMS Packaging Techniques

Integrated Transducers and Electro-Mechanical Mechanisms
1. Micro-Electro-Mechanical Sensor Design and Modeling
2. Signal Transduction Mechanism and Modeling:
3. Amperometric and voltammetric techniques
4. Biochemical sensing techniques
5. Sensor Noise Sources, Electro-Mechanical Mechanisms, and Modeling: Brownian noise, pull-in voltage, comb-drives, electrostatic stiffness, nonlinearities, etc.
6. Static (off-resonant) vs Resonant Sensors/Devices
7. Quality factor and its fundamental limiting sources

Interface IC techniques for low-frequency MEMS and Sensors
1. Small Signal Models
2. Continuous and Sampled-Data Systems
3. Switched Capacitor Charge Amplifiers and Integrators
4. Capacitive AC Bridges
5. Various Noise Sources, Noise in ICs
6. Noise and Offset Cancellation Techniques: CDS, chopper stabilization
7. Fully-Differential Op-Amps
8. Low Noise Op-Amps
9. Low-Noise Transimpedance Amplifiers
10. Biasing techniques
11. Distortion Analysis
12. Effect of Feedback on Noise and Distortion

High Frequency MEMS Devices and their Interface ICs
1. RF MEMS Passives: Micromechanical switches, High-Q inductors, Tunable capacitors
2. MEMS Resonators and Frequency Scaling
3. Flexural and bulk acoustic modes resonators, modeling
4. Oscillator design principles
5. MEMresonator-based Oscillator Design
6. Phase Noise
7. MEMresonator/oscillator sensors
8. MEMS Filter Design
9. Loss Sources and Mechanisms

Future Directions and Developments
1. Integrated Nano-Electro-Mechanical Systems (NEMS)
2. NEMS oscillators and sensors
3. Emerging applications