Title:  Hermetically-Encapsulated Precision Accelerometer Contact Microphones For Wearable Medical Devices

Committee: 

Dr. Ayazi, Advisor

Dr. Ansari, Chair

Dr. Inan

Abstract:

The objective of the proposed research is to design, fabricate and characterize a MEMS-based Accelerometer Contact Microphone (ACM) that enables wearable measurement of cardiovascular and cardiopulmonary sounds, providing a platform for longitudinal monitoring of vital health parameters. This work presents two designs of low noise, wide bandwidth out-of-plane accelerometer comprising sub-micron transduction gaps (270nm) electrodes implemented using HARPSS+ process, which are fabricated and characterized as a contact microphone.