Ph.D. Dissertation Defense - Chang-Shun Liu

Event Details

Monday, March 25, 2019

11:00am - 1:00pm

Room 509, TSRB

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Event Details

TitleAdvanced Single-chip Temperature Stabilization System for MEMS Resonators and Gyroscopes


Dr. Farrokh Ayazi, ECE, Chair , Advisor

Dr. Arijit Raychowdhury, ECE

Dr. Hua Wang, ECE

Dr. John Cressler, ECE

Dr. Peter Hesketh, ME


The main objective of this research is to develop temperature and frequency stabilization techniques for silicon MEMS oven-controlled crystal oscillators (MEMS OCXO) with high-frequency stability. The device is built upon an ovenized platform that uses a micro-heater to adjust the temperature of the resonator. Structural resistance-based temperature sensing is used to improve the self-temperature monitoring accuracy of the silicon MEMS resonator. An analog feedback micro-oven control loop and a feedforward digital calibration scheme are developed for a 77MHz MEMS oscillator, which achieves a ±0.3ppm frequency stability from -25°C to 85°C. This temperature stabilization technique is also applied to silicon MEMS mode-matched vibratory x/y-axis and z-axis gyroscopes on a single chip. The temperature-induced frequency change, scale factor and output bias variations are all reduced significantly. The complete interface circuit for the single-chip three axes gyroscopes were also developed with an innovative trans-impedance amplifier to reduce the input-referred noise. For the first time, the simultaneous operation of mode-matched vibratory 3-axis MEMS gyroscopes on a single chip is demonstrated.

Last revised March 6, 2019