| Turn on both the main power switch and the power on button located on left side of the front control panel. |
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| At this time the lid will automatically open and the three push-up pins located in the center of the spin coater will come to the UP position. |
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| If the lid does not open or the pins do not come up, clear the error by pressing the ENTER button on right side of the panel. If this does not clear the error, contact the lab instructor. |
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| Press 1 and ENTER on the front right panel to access program 1. The display will show oo1. Note: Program numbers have small zeros(o) before the program number, while parameter values have large zeros(0) before their parameter number. This program is a preset program with only one spin cycle and has three parameters: time(seconds), speed(x10 rpm) and acceleration(x100 rpm/s). |
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| Enter in the value for time parameter by using the number pad and then pressing ENTER. The values entered into the display scroll, so enter in 075 for 75 seconds. Next, enter in the speed parameter, paying attention to the fact that the value entered is multiplied by 10. Lastly enter in the acceleration value noting that the value entered is multiplied by 100. A light will blink next to the parameter being modified. |
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| You are now ready to run program 1. First ensure that oo1 is displayed indicating that program 1 is being accessed by the machine. Then press the START button located on the right side of the control panel. At this time, the raised pins in the center of the chuck will receed. |
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| Place the substrate between the four sets of position pins, depositing the corners of the substrate between the sets of positioning pins. Manually dispense the substance to be spun onto the center of the substrate. Allow for a dwell time of at least 10 seconds. The substance should cover about 2/3 of the surface of the substrate to eliminate edge effects. |
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| The next action to take place is the closing of the lid. For safety reasons and to provide for a quick stop if necessary, the two SAFETY INTERLOCK switches located in the front right and left corners of the spin coater must be held down to lower the lid. Hold down these two switches till the lid is fully closed. If at any time pressure on either of these two switches is removed, the lid will stop closing and return to the open position. Once you release the interlock switches, the spin cycle will commence. |
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| At the end of the spin cycle, the lid will automatically open and the push-up pins will raise to enable easy removeal of the substrate. Allow 1 minute before removing the substrate to allow the substrance to begin drying. |
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| When picking up the substrate, do so by holding the edge substrate with the palm of you hand or with the tips of your fingertips. Holding the substrate from underneath, as shown at right, will facilitate uneven drying in the regions where your fingers or palm touch the substrate. |
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| After the substrate is removed, it is time to clean the spin coater. Retrieve the deionized water, alcohol, methonal, and paper wipes, from the hooded area to the right of the spin coater. First apply alcohol to the chuck of the spin coater. Clean the entire top surface of the chuck, the areas surrounding the chuck and the underside of the rim of the lid with the solvent. Use the paper wipes the scrub and wipe up the solvent once done. Next repeat the previous procedure using deoinized water and lastly methonal. |
| Once the spin coater is cleaned, the last step in spin coating is closing the lid. First, enter 0 and then press ENTER. This will load program 0 and oo0 should be displayed. Next, hold down the safety interlock switches to close the lid, listening for a confirmation BEEP once the lid is down. Lastly, turn off the main power switch. |
