• Mission Statement
• Process Theory
  • Dielectric Deposition Theory
    • Spin Coating Theory
    • Meniscus Coating Theory
  • Pre-Bake Theory
  • Photolithography Theory
    • Exposure Theory
    • Development Theory
    • Potolithography Applet
  • Curing Theory
  • Plasma Etching Theory
  • Metallization Theory
  • References
• Process Steps
  • Substrate Cleaning
  • Dielectric Deposition Steps
    • Spin Coating Steps
    • Meniscus Coating Steps
  • Pre-Bake Steps
  • Photolithography Steps
    • Exposure Steps
    • Development Steps
  • Curing Steps
  • Plasma Etching Steps
  • Metallization Steps
• Process Flow Chart
• Interconnect Design
• Interconnect Testing
• Lecture Notes
• Lab Environment
  • Lab Safety
  • Map of Lab
  • Lab Location
• Glossary
• Related Links
• Site Map
• Authors
• Welcome Page