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Journal Papers
Conference Papers
Book Chapters
     
Journal Publications
53
J. L. Fu, R. Tabrizian, and F. Ayazi, "Dual-Mode AlN-on-Silicon Micromechanical Resonators For Temperature Sensing" in IEEE Transactions on Electron Devices, 61(2), 2014, pp. 591-597.
52
R. Tabrizian, M. Hodjat-Shamami, and F. Ayazi. "High-Frequency AlN-on-Silicon Resonant Square Gyroscopes." IEEE Journal of Microelectromechanical Systems, Vol. 22, Issue 5, October 2013, pp. 1007-1009.
51
R. Tabrizian, G. Casinovi, and F. Ayazi, "Temperature-Stable Silicon Oxide (SilOx) Micromechanical Resonators," IEEE Transactions on Electron Devices, Vol. 60, No. 8, August 2013, pp. 2656-2663.
50
M. Pardo and F. Ayazi, "An Empirical Phase-Noise Model for MEMS Oscillators Operating in Nonlinear Regime" IEEE Transaction on Circuits and Systems I, Vol. 59, Issue. 5, pp. 979-988
49
H. M. Lavasani, W. Pan, B. Harrington, R. Abdolvand, and F. Ayazi, "Electronic Temperature Compensation of Lateral Bulk Acoustic Resonator Reference Oscillators using Enhanced Series Tuning Technique" IEEE Journal of Solid-State Circuits, Vol. 47, Issue 6, pp. 1381-1393  
48
D. E. Serrano, R. Tabrizian, and F. Ayazi, "Electrostatically Tunable Piezoelectric-on-Silicon Micromechanical Resonator for Real Time Clock," IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, Vol. 59, Issue 3, March 2012, pp. 358-365  
47
A. K. Samarao and F. Ayazi, "Temperature Compensation of Silicon Resonators via Degenerate Doping,¡± IEEE Transactions on Electron Devices, Vol. 59, No. 1, January 2012, pp. 87 - 93.  
46
A. K. Samarao and F. Ayazi, "Postfabrication Electrical Trimming of Silicon Micromechanical Resonators via Joule Heating" IEEE Journal of Microelectromechanical Systems, Vol. 20, Issue 5, October 2011, pp. 1081 - 1088.  
45
H. M. Lavasani, W. Pan, B. Harrington, R. Abdolvand, and F. Ayazi, "A 76dB¥Ø 1.7GHz 0.18¥ìm CMOS Tunable TIA Using Broadband Current Pre-Amplifier for High Frequency Lateral MEMS Oscillators,¡± IEEE Journal of Solid-State Circuits, Vol. 46, No. 1, January 2011, pp. 224-235.  
44
G. Casinovi, X. Gao, and F. Ayazi, "Lamb Waves and Resonant Modes in Rectangular Bar Silicon Resonators" IEEE Journal of Microelectromechanical Systems, Vol. 19, Issue 4, August 2010, pp. 827 - 839.  
43
G.K. Ho, J. K. C. Perng, and F. Ayazi, "Micromechanical IBARs: Modeling and Process Compensation" IEEE Journal of Microelectromechanical Systems, Vol. 19, Issue 3, June 2010, pp. 516-525..  
42
G.K. Ho, K. Sundaresan, S. Pourkamali, and F. Ayazi, "Micromechanical IBARs: Tunable High-Q Resonators for Temperature-Compensated Reference Oscillators,¡± IEEE Journal of Microelectromechanical Systems, Vol. 19, Issue 3, June 2010, pp. 503-515.  
41
H. Johari and F. Ayazi, "High-Density Embedded Deep Trench Capacitors in Silicon with Enhanced Breakdown Voltage,¡± IEEE Transaction on Components and Packaging Technology, Vol. 32, No. 4, Dec. 2009, pp. 808-816.  
40
M. Rais-Zadeh, H.M. Lavasani, and F. Ayazi,, "An Integrated 800MHz Coupled Resonator Tunable Bandpass Filter in Silver with a Constant Bandwidth,” IEEE Journal of Microelectromechanical Systems, Volume 18, Issue 3, August 2009, pp. 942-949.  
39
M. Rais-Zadeh, A. Kapoor, and F. Ayazi,, "Fully integrated low-loss band-pass filters for wireless applications," Journal of Micromechanics and Microengineering, Volume 15, No. 8, July 2009, pp.1-8  
38
R. Abdolvand and F. Ayazi, "High Frequency Monolithic Thin-Film Piezoelectric-on-Substrate Filters," International Journal of Microwave and Wireless Technologies, Vol. 1, Issue 1, May 2009, pp. 29-35  
37
M.F. Zaman, A. Sharma, and F. Ayazi, “The Resonating Star Gyroscope: A Novel Multiple-Shell Gyroscope with sub-5 deg/hr Allan Deviation Bias Instability,” IEEE Sensors Journal, Volume 9, Issue 6, June 2009, pp. 616-624.  
36
A. Sharma, M.F. Zaman, and F. Ayazi, “A 0.1 deg/hr Bias Drift Micromechanical Silicon Gyroscope with Automatic CMOS Mode-Matching,” IEEE Journal of Solid-State Circuits, Volume 44, Issue 5, May 2009, pp. 1593-1608.  
35
R. Abdolvand, H. Mirilavasani, G.K. Ho, and F. Ayazi, “Thin-Film Piezoelectric-on-Silicon Resonators for High-Frequency Reference Oscillator Applications,” IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, Volume 55, Issue 12, December 2008, pp. 2596-2606.  
34
M.F. Zaman, A. Sharma, Z. Hao, and F. Ayazi, “A Mode-Matched Silicon-Yaw Tuning-Fork Gyroscope with Subdegree-Per-Hour Allan Deviation Bias Instability,” IEEE Journal of Microelectromechanical Systems, Vol. 17, Issue 6, December 2008, pp. 1526-1536.  
33
J. Fang, J. Fu, and F. Ayazi, “Metal-organic thin-film encapsulation for MEMS,” Journal of Micromechanics & Microengineering, Volume 18, No. 10, October 2008,.
32
R. Abdolvand and F. Ayazi, “An Advanced Reactive Ion Etching Process for Very-High Aspect-Ratio Sub-Micron Wide Trenches in Silicon,” Sensors and Actuators A: Physical, Volume 144, Issue 1, May 2008, pp. 109-116.  
31
M. Rais-Zadeh, J. Laskar, and F. Ayazi, “High performance inductors on CMOS-grade trenched silicon substrate,” IEEE Transaction on Components and Packaging Technology, Vol. 39, March 2008, pp. 126-134.  
30
G. K. Ho, R. Abdolvand, A. Sivapurapu, S. Humad, and F. Ayazi, "Piezoelectric-on-Silicon Lateral Bulk Acoustic Wave Micromechanical Resonators," IEEE Journal of Microelectromechanical Systems, Vol. 17, No. 2, April 2008, pp. 512-520.  
29
M. Rais-Zadeh, P. A. Kohl, and F. Ayazi, “MEMS Switched Tunable Inductors,” IEEE/ASME Journal of Microelectromechanical Systems, Vol. 17, No. 1, Feb. 2008, pp. 78-84.  
28
R. Abdolvand, B.V. Amini, and F. Ayazi, “Sub-micro-gravity in-plane accelerometers with reduced capacitive gaps and extra seismic mass,” IEEE Journal of Microelectromechanical Systems, Vol. 16, Oct. 2007, pp. 1036-1043.  
27
S. Pourkamali, G. K. Ho, and F. Ayazi, “Low-impedance VHF and UHF capacitive silicon bulk acoustic wave resonators - Part II: Measurement and Characterization,” IEEE Transactions on Electron Devices, Vol. 54, No. 8, Aug. 2007, pp. 2024-2030.  
26
S. Pourkamali, G. K. Ho, and F. Ayazi, “Low-impedance VHF and UHF capacitive silicon bulk acoustic wave resonators - Part I: Concept and Fabrication” IEEE Transactions on Electron Devices, May 2007, Vol. 54, No. 8, Aug. 2007, pp. 2017-2023.  
25
A. Sharma, M.F. Zaman, and F. Ayazi, “A 104dB Dynamic Range Transimpedance-Based CMOS ASIC for Tuning Fork Microgyroscopes,” IEEE Journal of Solid-State Circuits, Vol. 42, No. 8, Aug. 2007, pp. 1790-1802.  
24
K. Sundaresan, G.K. Ho, S. Pourkamali, and F. Ayazi, “Electronically temperature compensated Silicon bulk acoustic resonator reference oscillators,” IEEE Journal of Solid-State Circuits, Vol. 42, No. 6, June 2007, pp. 1425-1434.  
23
P. Joseph, P. Monajemi, F. Ayazi, and P. A. Kohl, “Wafer-Level Packaging of Micromechanical Resonators,” IEEE Trans. on Advanced Packaging, Vol. 30, No.1, Feb 2007, pp. 19-26.  
22
Z. Hao and F. Ayazi, “Support Loss in the Radial Bulk-mode Vibrations of Center-supported Micromechanical Disk Resonators,” Sensors and Actuators A: Physical, Volume 134, Issue 2, 15 March 2007, pp. 582-593.
21
B.V. Amini, R. Abdolvand, and F. Ayazi, “A 4.5mW closed-loop delta-sigma micro-gravity CMOS-SOI accelerometer,” IEEE Journal of Solid State Circuits, Vol. 41, No. 12, Dec. 2006, pp. 2983-2991  
20
R. Abdolvand and F. Ayazi, “A gap reduction and manufacturing technique for thick oxide mask layers with multiple-size sub-µm openings,” IEEE Journal of Microelectromechanical Systems, vol.15, no.5, Oct. 2006, pp. 1139- 1144.  
19
R. Abdolvand, H. Johari, G.K. Ho, A. Erbil, and F. Ayazi, “Quality factor in trench-refilled polysilicon beam resonators,” IEEE Journal of Microelectromechanical Systems, vol.15, no.3, June 2006, pp. 471- 478.  
18
P. Monajemi, P. Joseph, P. A. Kohl, and F. Ayazi, "Wafer-Level Packaging of MEMS via Thermally Released Metal-Organic Membranes," Journal of Micromechanics & Microengineering, vol. 16, March 2006, pp. 742-750.
17
K. Sundaresan, P.E. Allen, and F. Ayazi, “Process and temperature compensation in a 7MHz CMOS clock oscillator,” IEEE Journal of Solid-State Circuits, vol. 41, no. 2, Feb. 2006, pp. 433-441.
16
P. Monajemi and F. Ayazi, “Design Optimization and Implementation of a Micro-Gravity Capacitive HARPSS Accelerometer,” IEEE Sensors Journal, vol. 6, issue 1, Feb 2006, pp. 39-46.
15
M. Rais-Zadeh and F. Ayazi, "Characterization of High-Q Spiral Inductors on Thick Insulator-On-Silicon," Journal of Micromechanics and Microengineering, Vol. 15, Sept. 2005, pp. 2105-2112.
14
B.V. Amini and F. Ayazi, "Micro-Gravity Capacitive Silicon-On-Insulator Accelerometers," Journal of Micromechanics and Microengineering, Vol. 15, No. 11, Oct. 2005, pp. 2113-2120.
13
S. Pourkamali and F. Ayazi, “Electrically Coupled MEMS Bandpass Filters; Part II: Without Coupling Element,” Sensors and Actuators A, Aug. 2005, pp. 317-325.
12
S. Pourkamali and F. Ayazi, “Electrically Coupled MEMS Bandpass Filters; Part I: With Coupling Element,” Sensors and Actuators A, Aug. 2005, pp. 307-316.
11
B.V. Amini and F. Ayazi, “A 2.5V 14-bit Sigma-Delta CMOS-SOI Capacitive Accelerometer,” IEEE Journal of Solid State Circuits, Dec. 2004, pp. 2467-2476.
10
S. Pourkamali, Z. Hao, and F. Ayazi, “VHF Single Crystal Silicon Elliptic Bulk-Mode Capacitive Disk Resonators; Part II: Implementation and Characterization,” IEEE Journal of Microelectromechanical Systems, Vol. 13, No. 6, Dec. 2004, pp. 1054-1062.
9
Z. Hao, S. Pourkamali, and F. Ayazi, “VHF Single Crystal Silicon Elliptic Bulk-Mode Capacitive Disk Resonators; Part I: Design and Modeling,” IEEE Journal of Microelectromechanical Systems, Vol. 13, No. 6, Dec. 2004, pp. 1043-1053.
8
G. Piazza, R. Abdolvand, G. Ho, and F. Ayazi, “Piezoelectrically-Transduced, Capacitively-Tuned, High-Q Single-Crystal Silicon Micromechanical Resonators on SOI Wafers,” Sensors and Actuators A, Vol. 111, N1, March 2004, pp. 71-78.
7
Z. Hao, A. Erbil, and F. Ayazi, “An Analytical Model for Support Loss in Micromachined Beam Resonators with In-plane Flexural Vibrations,” Sensors and Actuators A, Vol. 109, Dec. 2003, pp.156-164.
6
S. Pourkamali, A. Hashimura, R. Abdolvand, G. Ho, A. Erbil, and F. Ayazi, “High-Q Single Crystal Silicon HARPSS Capacitive Beam Resonators with Sub-micron Transduction Gaps,” IEEE Journal of Microelectromechanical Systems, Vol. 12, No. 4, August 2003, pp. 487-496.
5
F. Ayazi, “The HARPSS Process for Fabrication of Precision MEMS Inertial Sensors,” Mechatronics 12 (2002), Nov. 2002, pp. 1185-1199, Elsevier Science Ltd.
4
F. Ayazi and K. Najafi, “A HARPSS Polysilicon Vibrating Ring Gyroscope,” IEEE Journal of Microelectromechanical Systems, vol. 10, June 2001, pp. 169-179.
3
F. Ayazi and K. Najafi, “High Aspect-Ratio Polysilicon Micromachining Technology,” Sensors and Actuators A, Vol. 87, Dec. 2000, pp. 46-51.
2
F. Ayazi and K. Najafi, “High Aspect-Ratio Combined Poly and Single-Crystal Silicon (HARPSS) MEMS Technology,” IEEE Journal of Microelectromechanical Systems, vol. 9, Sept. 2000, pp. 288-294.
1
N. Yazdi, F. Ayazi, and K. Najafi, “Micromachined Inertial Sensors,” Invited paper, Proceedings of the IEEE, Aug. 1998, pp. 1640-1659.
     
     
     
     
Conference Publications
147
D. E. Serrano, Y. Jeong, V. Keesara, W. K. Sung and F. Ayazi, "Single Proof-mass Tri-axial Pendulum Accelerometere Operating in Vacuum" IEEE International Micro Electro Mechanical Systems Conference (MEMS 2014), San Francisco, CA, Jan. 2014, pp. 28-31
146
R. Tabrizian and F. Ayazi, "Dual-Mode Vertical Membrane Resonant Pressure Sensor" IEEE International Micro Electro Mechanical Systems Conference (MEMS 2014), San Francisco, CA, Jan. 2014, pp. 120-123
145
N. Mehanathan, V. Tavassoli, P. Shao, L.D. Sorenson, and F. Ayazi, "INVAR-36 Micro Hemispherical Shell Resonators", IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2014), San Francisco, USA, Jan. 2014, pp. 40-43
144
P. Shao, V. Tavassoli, C. Liu, L. Sorenson, and F. Ayazi, "Electrical Characterization of ALD-coated Silicon Dioxide Micro-hemispherical Shell Resonators", IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2014), San Francisco, USA, Jan. 2014, pp. 612-615
143
R. Tabrizian and F. Ayazi, ¡°Acoustically-Engineered Multi-Port AlN-on-Silicon Resonators for Accurate Temperature Sensing,¡± Proc. of IEEE International Electron Devices Meeting (IEDM 2013), Washington, DC, Dec. 2013, pp. 1811-1814
141
Y. Jeong, and F. Ayazi, "A Novel Offset Calibration Method to suppress Capacitive Mismatch in MEMS Accelerometer" 9th Samsung Electro-mechanics 1nside Edge Best paper awards, Suwon, Korea, Nov. 2013
140
B. Hamelin, V. Tavassoli, and F. Ayazi, "Eutectic trimming of polysilicon micro hemispherical resonating Gyroscope" IEEE Sensors conference, Baltimore, 2013, pp.1-4
139
A. N. Shirazi, G. Casinovi, M. Dalal and F. Ayazi, "Combined Phase Readout and Self-calibration of MEMS Gyroscopes," International Conference on Solid-state Sensors, Acutators, and Microsystems (Transducers'13), Barcelona, Spain, June 2013, pp. 960-963
138
L. Sorenson, P. Shao, and F. Ayazi, "Effect of thickness anisotropy on degenerate modes in oxide micro-hemispherical shell resonators" IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2013), Taibei, Taiwan, Jan. 2013, pp. 169-172
137
F. Ayazi, R. Tabrizian, and L. Sorenson, "Compensation, tuning, and trimming of MEMS resonators" IEEE International Frequency Control Symposium (IFCS 2012), 2012, pp. 1-7
136
Y. Jeong, D.E. Serrano, V. Keesara, W.K. Sung, and F. Ayazi, "Wafer-level vacuum-packaged triaxial acceerometer with nano airgaps" IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2013), Taibei, Taiwan, Jan. 2013, pp. 33-36
135
F. Ayazi, "MEMS and microsystems for navigation, sensing, and spectral processing" IEEE International Symposium on Micro-NanoMechatronics and Human Science (MHS), 2012, pp. 1
134
P. Shao, L. Sorenson, X. Gao and F. Ayazi, "Wineglass-on-a-chip" Solid-state Sensors, Actuators, and Microsystems Workshop (Hilton Head 2012), Hilton Head Island, SC, June 2012, pp. 275-278
133
Y. Jeong, and F. Ayazi, "Process compensated CMOS temperature sensor for microprocessor application" IEEE International Symposium on Circuits and Systems (ISCAS 2012), Seoul, Korea, 2012, pp. 3118-3121
132
L. Sorenson, and F. Ayazi, "A 100 MHz MEMS SiBAR phase modulator for quadrature phase shift keying" IEEE International Frequency Control Symposium (IFCS 2012), 2012, pp. 1-4
131
J. Fu, Y. Nakano, L. Sorenson, and F. Ayazi, "Multi-Axis ALN-on-Silicon Vibration Energy Harvester with Integrated Frequency-Upconverting Transducers," IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2012), Paris, France, Jan. 2012, pp. 1269-1272
130
G. Casinovi, W.K. Sung, M. Dalal, A. N. Shirazi, and F. Ayazi, "Electrostatic Self-Calibration of Vibratory Gyroscopes," IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2012), Paris, France, Jan. 2012, pp. 559-562.
129
L. Sorenson, X. Gao, and F. Ayazi, "3-D Micromachined Hemispherical Shell Resonators with Integrated Capacitive Transducers," IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2012), Paris, France, Jan. 2012, pp. 168-171.
128
R. Tabrizian, M. Pardo, and F. Ayazi, "A 27 MHz Temperature Compensated MEMS Oscillator with Sub-ppm Instability," IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2012), Paris, France, Jan. 2012, pp. 23-26.
127
F. Ayazi, "Multi-DOF Inertial MEMS: From Gaming to Dead Reckoning," Invited Paper, Tech. Digest of the 16th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS¡¯11), Beijing, China, June 2011, pp. 2805-2808.
126
R. Tabrizian and F. Ayazi, "Laterally Excited Silicon Bulk Acoustic Resonator with Sidewall AlN," International Conference on Solid-State Sensors, Acutators and Microsystems (Transducers), Beijing, China, June 2011.
125
W. K. Sung, M. Dalal, and F. Ayazi, "A Mode-Matched 0.9 MHz Single Proof-Mass Dual-Axis Gyroscope," Tech. Digest of the 16th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS¡¯11), Beijing, China, June 2011, pp. 2821-2824.
124
L. Sorenson, J.L. Fu, and F. Ayazi, "One-Dimensional Linear Acoustic Bandgap Structures for Performance Enhancement of AlN-on-Si Micromechanical Resonators," Tech. Digest of the 16th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS¡¯11), Beijing, China, June 2011, pp. 918-921.
123
R. M. Haque, D. E. Serrano, X. Gao, A. N.-Shirazi, V. Keesara, F. Ayazi and K. D. Wise, "Hermetic Packaging of Resonators with Vertical Feedthroughs Using a Glass-In-Silicon Reflow Process" International Conference on Solid-State Sensors, Acutators and Microsystems (Transducers), Beijing, China, June 2011.
122
M. Pardo and F. Ayazi, "A Band-Reject Nested-PLL Phase-Noise Reduction Scheme for Clock-Cleaners,¡± Tech. Digest 2011 IEEE International Symposium on Circuits and Systems (ISCAS 2011), Rio de Janeiro, Brazil, May 2011, pp. 470 ? 473
121
M. Pardo L. Sorenson and F. Ayazi, "A Phase-Noise Model for Nonlinear Piezoelectrically-Actuated MEMS Oscillators" Tech. Digest 2011 IEEE International Symposium on Circuits and Systems (ISCAS 2011), Rio de Janeiro, Brazil, May 2011, pp. 221 - 224.
120
G. Casinovi, A. K. Samarao and F. Ayazi, "Compact Parametric Model of Capacitive BAW Resonators" Proceedings of the 2011 Joint IEEE International Frequency Control Symposium & European Frequency and Time Forum (IFCS/EFTF 2011), San Francisco, CA, May 2011, pp. 127-130.
119
L. Sorenson, J.L. Fu, and F. Ayazi, "Linear Acoustic Bandgap Arrays for Spurious Mode Suppression in Piezoelectric MEMS Resonators," Proceedings of the 2011 Joint IEEE International Frequency Control Symposium & European Frequency and Time Forum (IFCS/EFTF 2011), San Francisco, CA, May 2011, pp. 769-773.
118
D. E. Serrano, R. Tabrizian and F. Ayazi, "Tunable Piezoelectric MEMS resonators for Real-Time Clock," Proceedings of the 2011 Joint IEEE International Frequency Control Symposium & European Frequency and Time Forum (IFCS/EFTF 2011), San Francisco, CA, May 2011, pp. 765-768.
117
R. Tabrizian and F.Ayazi, "Tunable Silicon Bulk Acoustic Resonators with Multi-Face AlN Transduction," Proceedings of the 2011 Joint IEEE International Frequency Control Symposium & European Frequency and Time Forum (IFCS/EFTF 2011), San Francisco, CA, May 2011, pp. 749-752.
116
G. K. Ho, S. Pourkamali and F. Ayazi, "Bulk Modes in Single Crystal Silicon" Proceedings of the 2011 Joint IEEE International Frequency Control Symposium & European Frequency and Time Forum (IFCS/EFTF 2011), San Francisco, CA, May 2011, pp. 20-25.
115
F.Ayazi, L. Sorenson, R. Tabrizian, "Energy Dissipation in Micromechanical Resonators," SPIE Defense, Security, and Sensing 2011, Proc. SPIE 8031, 803119 (2011), Orlando, FL, April 2011, pp. 1-13.
114
M. Pardo, L. Sorenson, W. Pan, and F. Ayazi, "Phase Noise Shaping Via Forced Nonlinearity in Piezoelectrically Actuated Silicon Micromechanical Oscillators," IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2011), Cancun, Mexico, Jan. 2011, pp. 780-784.
113
M.J. Dalal, J.L. Fu, and F. Ayazi, "Simultaneous Dual-Mode Excitation of Piezo-on-Silicon Micromechanical Oscillator for Self-Temperature Sensing," IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2011), Cancun, Mexico, Jan. 2011, pp. 489-492.
112
A.K. Samarao and F. Ayazi, "Combined Capacitive and Piezoelectric Transduction for High Performance Silicon Microresonators," IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2011), Cancun, Mexico, Jan. 2011, pp. 169-172.
111
A.K. Samarao and F. Ayazi, "Self-polarized capacitive silicon micromechanical resonators via charge trapping," IEEE International Electron Devices Meeting (IEDM 2010), San Francisco, CA, Dec. 2010, pp. 741-744.
110
J. L. Fu and F. Ayazi, "Dual-Mode Piezo-on-Silicon Resonant Temperature and Humidity Sensor for Portable Air Quality Monitoring Systems," in IEEE Sensors Conference, Waikoloa, Big Island, Hawaii, 2010, pp. 2131-2135.
109
A.K. Samarao and F. Ayazi, "Quality Factor Sensitivity to Crystallographic Misalignments in Silicon Micromechanical Resonators," Tech. Digest Solid-State Sensors, Actuators, and Microsystems Workshop, Hilton Head, SC, June 2010, pp. 479-482.
108
R. Tabrizian, G. Casinovi and F. Ayazi, "Temperature-Stable High-Q AlN-on-Silicon Resonators with Embedded Array of Oxide Pillars," Solid-State Sensors, Actuators, and Microsystems Workshop (Hilton Head 2010), Hilton Head Island, SC, June 2010, pp. 100-101.
107
A. K. Samarao and F. Ayazi, "Intrinsic Temperature Compensation of Highly Resistive High-Q Silicon Microresonators via Charge Carrier Depletion," IEEE International Frequency Control Symposium (IFCS 2010), Newport Beach, CA, June 2010, pp. 334-339.
106
H.M. Lavasani, W. Pan, B. Harrington, R. Abdolvand, and F. Ayazi, “A 76dBOhm, 1.7 GHz, 0.18um CMOS Tunable Transimpedance Ampflier Using Broadband Current Pre-Amplifier for High Frequency Lateral Micromechanical Oscillators,” IEEE International Solid State Circuits Conference (ISSCC 2010), San Francisco, CA, Jan. 2010, pp. 318-320
105
W. Pan and F. Ayazi, “Thin-Film Piezoelectric-on-Substrate Resonators with Q Enhancement and TCF Reduction,” IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2010), Hong Kong, Jan. 2010, pp. 104-107
104
W.K. Sung, M. Dalal, and F. Ayazi, “A 3MHz Spoke Gyroscope with Wide Bandwidth and Large Dynamic Range,” IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2010), Hong Kong, Jan. 2010, pp. 104-107
103
A.K. Samarao, G. Casinovi, and F. Ayazi, “Passive TCF Compensation in High Q Silicon Micromechanical Resonators,” IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2010), Hong Kong, Jan. 2010, pp. 116-119
102
Y. Shim, R. Tabrizian, F. Ayazi and M. Rais-Zadeh, “Low-Loss MEMS Band-Pass Filters with Improved Out-of-Band Rejection by Exploiting Inductive Parasitics,” IEEE International Electron Devices Meeting (IEDM 2009), Baltimore, MD, Dec. 2009, pp. 801-804
101
A.K. Samarao and F. Ayazi, “Temperature Compensation of Silicon Micromechanical Resonators via Degenerate Doping,” IEEE International Electron Devices Meeting (IEDM 2009), Baltimore, MD, Dec. 2009, pp. 789-792
100
S. Horst, S. Phillips, H. M. Lavasani, F. Ayazi, J. D. Cressler, "SiGe digital frequency dividers with reduced residual phase noise," Proc. IEEE Custom Integrated Circuits Conference (CICC 2009), San Jose, CA, Sept. 2009, pp. 251-254.
99
F. Ayazi, “MEMS for Integrated Timing and Spectral Processing,” Invited Paper, Proc. IEEE Custom Integrated Circuits Conference (CICC 2009), Sep. 2009, pp. 65-72
98
R. Tabrizian, M. Rais-Zadeh, and F. Ayazi, “Effect of Phonon Interactions on Limiting the fQ Product of Micromechanical Resonators,” IEEE International Conference on Solid-state Sensors, Actuators and Microsystems (Transducers 2009), Denver, CO, June. 2009, pp. 2131-2134
97
S. Lee, J. Cho, S. Lee, M.F. Zaman, F. Ayazi, and K. Najafi, “A Low Power Oven-Controlled Vacuum Package Technology for High Performance MEMS,” IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2009), Sorento, Italy, Jan. 2009, pp. 753-756  
96
A. K. Samarao and F. Ayazi, “Post Fabrication Electrical Trimming of Silicon Bulk Acoustic Resonators using Joule Heating,” IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2009), Sorento, Italy, Jan. 2009, pp. 892-895.
95
G. Casinovi, X. Gao, and F. Ayazi, “Analytical Modeling and Numerical Simulation of Capacitive Silicon Bulk Acoustic Resonators,” IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2009), Sorento, Italy, Jan. 2009, pp. 935-938.
94
H. Miri Lavasani, A. K. Samarao, G. Casinovi, and F. Ayazi, “A 145MHz Low Phase Noise Capacitive Silicon Micromechanical Resonator,” Tech. Dig. IEEE Int. Electron Device Meeting (IEDM 2008), San Francisco, CA, Dec. 2008, pp. 675-678.  
93
J. Fang, J. Fu, and F. Ayazi, “Metal-Organic Thin-Film Encapsulation for Gravimetric Gas Microsensors,“ to appear in Digest of The 12th International Conference on Miniaturized Systems for Chemistry and Life Sciences (MicroTAS 2008), San Diego, CA, Oct. 2008.
92
R. Abdolvand and F. Ayazi, “High Frequency ZnO-on-Diamond Monolithic Filters,” Tech. Dig. Solid-State Sensors, Actuators, and Microsystems Workshop, Hilton Head Island, SC, June 2008, pp. 384-385.  
91
W. Pan and F. Ayazi, “Multiple-Frequency Thickness-Mode Thin-Film Piezoelectric-on-Substrate Filter Array,” Tech. Digest 2008 IEEE International Frequency Control Symposium (IFCS 2008), Honolulu, HI, May 2008.  
90
J. Shah, H. Johari, and F. Ayazi, “CMOS ASIC for MHz Silicon BAW Gyroscope,” Tech. Digest 2008 IEEE International Symposium on Circuits and Systems (ISCAS 2008), Seattle, WA, May 2008, pp. 2458-2461.  
89
D. Zhao, M.F. Zaman, and F. Ayazi, “An Ultra-Low Noise Chopper-Stabilized Lateral BJT Interface Circuit in 0.6um CMOS for Capacitive Accelerometers,” Tech. Digest IEEE International Solid-State Circuits Conference (ISSCC 2008), San Francisco, CA, Feb. 2008, pp. 584-585.  
88
H. M. Lavassani, R. Abdolvand, and F. Ayazi, “Low phase noise UHF thin-film piezoelectric-on-substrate LBAR oscillators,” Proc. 21st IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2008), Tucson, AZ, Jan. 2008, pp. 112-115.  
87
H. Johari, J. Shah, and F. Ayazi, “High frequency XYZ-axis single-disk silicon gyroscope,” Proc. 21st IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2008), Tucson, AZ, Jan. 2008, pp. 856-859.  
86
M. Rais-Zadeh, A. K. Samarao, P. Monajemi, and F. Ayazi, “Low-voltage large-value tunable capacitors using self-aligned HARPSS,” Proc. 21st IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2008), Tucson, AZ, Jan. 2008, pp. 319-322.  
85
M. Rais-Zadeh and F. Ayazi, “Small-bandwidth integrated tunable bandpass filters for GSM applications,” Proc. 21st IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2008), Tucson, AZ, Jan. 2008, pp. 1032-1035.    
84
A. Sharma, M. F. Zaman, M. Zurcher, and F. Ayazi, "A 0.1degree/hr bias drift electronically matched tuning fork microgyroscope,” Proc. 21st IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2008), Tucson, AZ, Jan. 2008, pp. 6-9.  
83
W. Pan, R. Abdolvand, and F. Ayazi, “A low-loss 1.8GHz monolithic thin-film piezoelectric-on-substrate filter,” Proc. 21st IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2008), Tucson, AZ, Jan. 2008, pp. 176-179.  
82
R. Abdolvand, H. Miri Lavassani, and F. Ayazi, “Single-Resonator Dual-Frequency Thin-Film Piezoelectric-on-Substrate Oscillator,” Tech. Dig. IEEE Int. Electron Device Meeting (IEDM 2007), Washington, DC, Dec. 2007, pp. 419-422.  
81
R. Abdolvand and F. Ayazi, “Enhanced Power Handling and Quality Factor in Thin-Film Piezoelectric-on-Substrate Resonators, IEEE International Ultrasonics Symposium, New York, NY, Oct. 2007, pp. 608-611.  
80
W. Pan, R. Abdolvand, and F. Ayazi, “Effect of Nonuniform Loading Layer on Monolithic Thickness-Mode Piezoelectric Filters,” IEEE International Ultrasonics Symposium, New York, NY, Oct. 2007, pp. 1645-1648.  
79
Q. Qin, S. Pourkamali, and F. Ayazi, “Capacitively Coupled VHF Silicon Bulk Acoustic Wave Filters,” IEEE International Ultrasonics Symposium, New York, NY, Oct. 2007, pp. 1649-1652.  
78
H. Miri Lavassani, R. Abdolvand, and F. Ayazi, “A 500MHz Low Phase Noise AlN-on-Silicon Reference Oscillator,” Proc. IEEE Custom Integrated Circuits Conference (CICC 2007), Sept. 2007, pp. 599-602.  
77
A. Sharma, M. F. Zaman, and F. Ayazi, “A Smart Angular Rate Sensor System,” Proc. IEEE Sensors 2007, Atlanta, GA, Oct. 2007, pp. 1116-1119. (Best paper award)  
76
S. Pourkamali and F. Ayazi, “Wafer-Level Encapsulation and Sealing of Electrostatic HARPSS Transducers,” Proc. IEEE Sensors 2007, Atlanta, GA, Oct. 2007, pp. 49-52.  
75
R. Abdolvand, H. Miri Lavassani, and F. Ayazi, “A Low Voltage Temperature-Stable Micromechanical Piezo Oscillator,” Tech. Digest of the 14th International Conference on Solid State Sensors, Actuators and Microsystems (Transducers'07), Lyon, France, June 2007, pp. 53-56.  
74
M. Rais-Zadeh, H. Miri Lavassani, and F. Ayazi, “CMOS-Compatible Encapsulated Silver Bandpass Filters,” in Proc. 2007 IEEE MTT-S International Microwave Symposium (IMS 2007), Honolulu, Hawaii, June 2007, pp. 1301-1304.  
73
R. Abdolvand and F. Ayazi, “Monolithic Thin Film Piezoelectric-on-Substrate Filters,” in Proc. 2007 IEEE MTT-S International Microwave Symposium (IMS 2007), Honolulu, Hawaii, June 2007, pp. 509-512.  
72
A. Sharma, M.F. Zaman, and F. Ayazi, “A 0.2deg/hr Micro-Gyroscope with Automatic CMOS Mode Matching,” Tech. Digest IEEE International Solid-State Circuits Conference (ISSCC 2007), San Francisco, CA, Feb. 2007, pp. 386-387.  
71
G. K. Ho, R. Abdolvand, and F. Ayazi, “High Order Composite Bulk Acoustic Resonators,” Proc. 20th IEEE International Conf. on Micro Electro Mechanical Systems (MEMS 2007), Kobe, Japan, Jan. 2007, pp. 791-794.  
70
G. K. Ho, J. K. C. Perng, and F. Ayazi, “Process Compensated Micromechanical Resonators,” Proc. 20th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2007), Kobe, Japan, Jan. 2007, pp. 183-186.  
69
R. Abdolvand, G.K. Ho, J. Butler, and F. Ayazi, “ZnO-on-nanocrystalline-diamond lateral bulk acoustic resonators,” Proc. 20th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2007), Kobe, Japan, Jan. 2007, pp. 795-798.  
68
H. Johari and F. Ayazi, "High Frequency Capacitive Disk Gyroscopes in (100) and (111) Silicon," Proc. 20th IEEE International Conf. on Micro Electro Mechanical Systems (MEMS 2007), Kobe, Japan, Jan. 2007, pp. 47-50.  
67
M. Rais-Zadeh, P. A. Kohl, and F. Ayazi, “A packaged micromachined switched tunable inductor,” Proc. 20th IEEE Micro Electro Mechanical Systems Conf. (MEMS 2007), Kobe, Japan, Jan. 2007, pp. 799-802.  
66
M. Rais-Zadeh and F. Ayazi, “High-Q tunable silver capacitors for RFICs,”  Proc. 7th Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems (SiRF 2007), Long Beach, CA, Jan. 2007, pp. 169-172.  
65
M. Rais-Zadeh, P. A. Kohl, and F. Ayazi, “High-Q micromachined silver passives and filters,” Tech. Dig. IEEE Int. Electron Device Meeting (IEDM 2006), San Francisco, CA, Dec. 2006, pp. 727-730.  
64
H. Johari and F. Ayazi, "Capacitive Bulk Acoustic Wave Silicon Disk Gyroscopes," Tech. Dig. IEEE Int. Electron Devices Meeting (IEDM 2006), San Francisco, CA, Dec. 2006, pp. 513-516.  
63
R. Abdolvand, Z. Hao, and F. Ayazi, “Temperature-Compensated ZnO-On-Diamond Resonant Mass Sensor,” Proc. IEEE Sensors 2006, Daegu, South Korea, Oct. 2006, pp. 1297-1300.  
62
Z. Hao, M. F. Zaman, A. Sharma, and F. Ayazi, “Energy Loss Mechanisms in a Bulk-Micromachined Tuning Fork Gyroscope,” Proc. IEEE Sensors 2006, Daegu, South Korea, Oct. 2006, pp. 1333-1336.  
61
H. Johari and F. Ayazi, “Silicon-On-Insulator Bulk Acoustic Wave Disk Resonators,” Tech. Dig. IEEE Int. SOI Conference, Niagara Falls, NY, Oct. 2006, pp. 153-154.  
60
K. Sundaresan, G.K. Ho, S. Pourkamali, and F. Ayazi, “A Low Phase Noise 100MHz Silicon BAW Reference Oscillator,” Proc. of the IEEE Custom Integrated Circuits Conference (CICC 2006), Sept. 2006, pp. 841-844.  
59
A. Sharma, M.F. Zaman, and F. Ayazi, “A 104dB SNDR Transimpedance-based CMOS ASIC for Tuning Fork Microgyroscopes,” Proc. of the IEEE Custom Integrated Circuits Conference (CICC 2006), Sept. 2006, pp. 655-658.  
58
F. Ayazi, S. Pourkamali, G.K. Ho, and R. Abdolvand, “High-Aspect-Ratio SOI Vibrating Micromechanical Resonators and Filters,” Invited paper, Proc. 2006 IEEE MTT-S International Microwave Symposium (IMS 2006), San Francisco, CA, June 2006, pp 676-679.  
57
S. Pourkamali and F. Ayazi, “High frequency low impedance capacitive silicon BAR structures,” Tech. Dig. Solid-State Sensors, Actuators, and Microsystems Workshop, Hilton Head, SC, June 2006, pp.284-287.  
56
P.M. Raj, I.R. Abothu, R. Abdolvand, F. Ayazi, and R. Tummala, “Integrating Solution-Derived 3D PZT Structures on Si MEMS Platform for RF and Biomedical Applications,” Proc. IEEE Advanced Packaging Materials (APM), Atlanta, GA, March 2006, p.122  
55
P. Monajemi, P. Joseph, P. A. Kohl, and F. Ayazi, "Characterization of a Polymer-Based MEMS Packaging Technique," Proc. IEEE Advanced Packaging Materials (APM), Atlanta, GA, March 2006, pp.139-144.  
54
B. Vakili Amini, R. Abdolvand and F. Ayazi, “A 4.5 mW Closed-Loop Delta-Sigma Micro-g CMOS-SOI Accelerometer,” in Tech. Digest IEEE International Solid-State Circuits Conference (ISSCC 2006), San Francisco, CA, Feb. 2006, pp. 288-289.  
53
G. K. Ho, K. Sundaresan, S. Pourkamali, and F. Ayazi, "Temperature Compensated IBAR Reference Oscillators," Proc. 19th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2006), Istanbul, Turkey, Jan. 2006, pp. 910-913.  
52
Z. Hao, R. Abdolvand, and F. Ayazi, “A High-Q Length-Extensional Bulk-Mode Mass Sensor with Annexed Sensing Platforms,” Proc. 19th IEEE International Conference on Micro Electro Mechanical Systems (MEMS2006), Istanbul, Turkey, Jan. 2006, pp. 598-601.
51
M. F. Zaman, A. Sharma and F. Ayazi, “High Performance Matched-Mode Tuning Fork Gyroscope,” Proc. 19th IEEE International Conference on Micro Electro Mechanical Systems (MEMS2006), Istanbul, Turkey, Jan. 2006, pp. 66-69.
50
Z. Hao and F. Ayazi, “Thermoelastic Damping in Flexural-Mode Ring Gyroscopes,” 2005 ASME International Mechanical Engineering Congress and Exposition, Orlando, Nov. 2005, IMECE2005-79965.
49
B. Vakili Amini, R. Abdolvand, and F. Ayazi, “Sub-micro-gravity Capacitive SOI Microaccelerometers,” Digest of the 13th International Conference on Solid State Sensors, Actuators and Microsystems (Transducers'05), Seoul, Korea, June 2005, pp. 515-518.
48
P. Monajemi and F. Ayazi, “A High-Q Low-Voltage HARPSS Tunable Capacitor,” Proc. 2005 IEEE MTT-S International Microwave Symposium (IMS 2005), Long Beach, CA, June 2005, pp.749-752.  
47
K. Sundaresan, G. K. Ho, S. Pourkamali, and F. Ayazi, “A Two-Chip 4-MHz Microelectromechanical Reference Oscillator,” Proc. 2005 IEEE International Symposium on Circuits and Systems (ISCAS 2005), Kobe, Japan, May 2005, pp. 5461-5464.
46
P. Monajemi and F. Ayazi, “Thick Single Crystal Silicon MEMS with High Aspect Ratio Vertical Air Gaps,” Proc. SPIE Symposium on MOEMS-MEMS Micro & Nanofabrication, San Jose, CA, Jan. 2005, Vol. 5715, pp. 138-147.
45
A. Salim, X. Huang, S. Humad, F. Ayazi, and B. Ziaie, “Adjustable Force Soft Landing Contact Lithography for Precision Patterning of Biomolecules,” Proc. IEEE Micro Electro Mechanical Systems Conference (MEMS’05), Miami, FL, January 2005, pp. 770-773.  
44
R. Abdolvand and F. Ayazi, “Single-Mask Reduced-Garp Capacitive Micromachined Devices,” in Proc. IEEE MicroElectro Mechanical Systems Conference (MEMS’05), Miami, FL, Jan. 2005, pp. 151-154.
43
M. Zaman, A. Sharma, B. Amini, and F. Ayazi, “The Resonating Star Gyroscope,” Proc. IEEE Micro Electro Mechanical Systems Conference (MEMS‘05), Miami, FL, Jan. 2005, pp. 355-358.
42
P. Monajemi, P. Joseph, P. Kohl, and F. Ayazi, “A Low Cost Wafer-Level MEMS Packaging Technology,” Proc. IEEE Micro Electro Mechanical Systems Conference (MEMS‘05), Miami, FL, Jan. 2005, pp. 634-637.
41
Z. Hao and F. Ayazi, “Support Loss in Micromechanical Disk Resonators,” Proc. IEEE Micro Electro Mechanical Systems Conference (MEMS‘05), Miami, FL, Jan. 2005, pp. 137-141.
40
M. Rais-Zadeh, P. Monajemi, S. Yoon, J. Laskar, and F. Ayazi, “High-Q Integrated Inductors on Trenched Silicon Islands,” Proc. IEEE Micro Electro Mechanical Systems Conference (MEMS‘05), Miami, FL, Jan. 2005, pp. 199-202.
39
S. Pourkamali, G. K. Ho, and F. Ayazi, “Vertical Capacitive SiBARs,” Proc. IEEE Micro Electro Mechanical Systems Conference (MEMS‘05), Miami, FL, Jan. 2005, pp. 211-214.
38
G.K. Ho, K. Sundaresan, S. Pourkamali, and F. Ayazi, “Low-Motional-Impedance Highly-Tunable I2 Resonators for Temperature-Compensated Reference Oscillators,” Proc. IEEE Micro Electro Mechanical Systems Conference (MEMS‘05), Miami, FL, Jan. 2005, pp. 116-120.
37
R. Sunier, P.Monajemi, F. Ayazi, H. Baltez, and O. Brand, "Precise Release and Insulation Technology for Vertical Hall Sensors and Trench-Defined MEMS," Proc. IEEE Sensors, Vienna, Austria, Oct. 2004, pp.1442-1445.
36
A. Sharma, M.F. Zaman, B.V. Amini, and F. Ayazi, “A High Q In-Plane Silicon-On-Insulator Tuning-Fork Gyroscope,” Proc. IEEE Sensors, Vienna, Austria, Oct. 2004, pp. 467-470.
35
S. Pourkamali and F. Ayazi, “High Frequency Capacitive Micromechanical Resonators with Reduced Motional Resistance Using the HARPSS Technology,” in Tech. Dig. IEEE Topical Meeting on Si Monolithic ICs in RF Systems, Atlanta, GA, Sept. 2004, pp. 147-150.  
34
A.O. Aggarwal, K. Naeli, P.M. Raj, F. Ayazi, S. Bhattacharya, and R.R. Tummala, “MEMS Composite Structures for Tunable Capacitors and IC-Package Nano-Interconnects,” in Proc. 54th Electronic Components and Technology Conference, Las Vegas, NV, June 2004, pp. 835-842.  
33
B.V. Amini, S. Pourkamali, M. Zaman, and F. Ayazi, “A New Input Switching Scheme for a Capacitive Micro-g Accelerometer,” Tech. Dig. 2004 Symposium on VLSI Circuits, Honolulu, HI, June 2004, pp. 310-313.  
32
M.F. Zaman, A. Sharma, B. V. Amini, and F. Ayazi, “Towards Inertial Grade Vibratory Microgyros: A High-Q In-Plane Silicon-On-Insulator Tuning Fork Device,” Tech. Dig. Solid-State Sensors, Actuators, and Microsystems Workshop, Hilton Head, SC, June 2004, pp. 384-385.
31
S. Pourkamali and F. Ayazi, “18μm Thick High Frequency Capacitive HARPSS Resonators with Reduced Motional Resistance,” Tech. Dig. Solid-State Sensors, Actuators, and Microsystems Workshop, Hilton Head, SC, June 2004, pp. 392-393.
30
R. Abdolvand, G. K. Ho, and F. Ayazi, “Poly-Wire-Coupled Single Crystal Silicon HARPSS Micromechanical Filters Using Oxide Islands,” Tech. Dig. Solid-State Sensors, Actuators, and Microsystems Workshop, Hilton Head, SC, June 2004, pp. 242-245..
29
B. V. Amini, S. Pourkamali, and F. Ayazi, “A 2.5V 14bit Sigma-Delta CMOS-SOI Capacitive Accelerometer,” Tech. Dig. IEEE International Solid-State Circuits Conference (ISSCC 2004), San Francisco, CA, Feb. 2004, pp. 314-315.
28
B. V. Amini, S. Pourkamali, and F. Ayazi, “A High Resolution Stiction-less CMOS Compatible SOI Accelerometer with a Low Noise, Low Power, 0.25µm CMOS Interface,” Proc. IEEE Micro Electro Mechanical Systems Conference (MEMS‘04), Maastricht, the Netherlands, Jan. 2004, pp. 572-575.
27
S. Pourkamali, R. Abdolvand, G.K. Ho, and F. Ayazi, “Electrostatically Coupled Micromechanical Beam Filters,” Proc. IEEE Micro Electro Mechanical Systems Conference (MEMS‘04), Maastricht, the Netherlands, Jan. 2004, pp. 584-587.
26
S. Pourkamali and F. Ayazi, “Fully Single Crystal Silicon Resonator with Deep-Submicron Dry-Etched Transducer Gaps,” Proc. IEEE Micro Electro Mechanical Systems Conference (MEMS‘04), Maastricht, the Netherlands, Jan. 2004, pp. 813-816.
25
G.K. Ho, R. Abdolvand, and F. Ayazi, “Through-Support-Coupled Micromechanical Filter Array,” Proc. IEEE Micro Electro Mechanical Systems Conference (MEMS‘04), Maastricht, the Netherlands, Jan. 2004, pp. 769-772.
24
S. Humad, R. Abdolvand, G.K. Ho, G. Piazza, and F. Ayazi, “High Frequency Micromechanical Piezo-On-Silicon Block Resonators,” Tech. Dig. IEEE Int. Electron Devices Meeting (IEDM 2003), Washington, DC, Dec. 2003, pp. 957-960.
23
G. Wang, A. Bacon, R. Abdolvand, F.  Ayazi, J.  Papapolymerou, and E. Tentzeris, “Finite Ground Coplanar Lines on CMOS Grade Silicon with a Thick Embedded Silicon Oxide Layer Using Micromachining Techniques,” 33rd European Microwave Conference, Vol. I, October 2003, pp. 25-27.  
22
A. Bavisi, S. Dalmia, M. Swaminathan, and F. Ayazi, “A 802.11a WLAN Oscillator with High Q Embedded Passives on Laminate-Type Organic Package,” 2003 IEEE Topical Conference on Wireless Communication Technology, Honolulu, Hawaii, Oct. 2003, pp. 166-167.  
21
R. Abdolvand, G.K. Ho, A. Erbil, and F. Ayazi, "Thermoelastic Damping in Trench-Refilled Polysilicon Resonators," Digest of the 12th International Conference on Solid State Sensors, Actuators and Microsystems (Transducers'03), Boston, MA, June 8-12, 2003, pp. 324-327.
20
S. Pourkamali and F. Ayazi, "SOI-Based HF and VHF Single-Crystal Silicon Resonators with Sub-100 Nanometer Vertical Capacitive Gaps," Digest of the 12th International Conference on Solid State Sensors, Actuators and Microsystems (Transducers'03), Boston, MA, June 8-12, 2003, pp. 837-840.
19
K. Sundaresan, K. Brouse, K. U-Yen, F. Ayazi, and P. Allen, “A 7-MHz Process, Temperature and Supply Compensated Clock Oscillator in 0.25 CMOS,” Proc. 2003 IEEE International Symposium on Circuits and Systems (ISCAS 2003), Bangkok, Thailand, May 2003, pp. 693-696.
18
G. Piazza, R. Abdolvand, and F. Ayazi, “Voltage-Tunable, Piezoelectrically-Transduced, Single-Crystal Silicon Resonators on SOI Substrates,” Proc. IEEE Micro Electro Mechanical Systems Conference (MEMS‘03), Kyoto, Japan, Jan. 2003, pp. 149-152.
17
S. Pourkamali, R. Abdolvand, and F. Ayazi, “A 600kHz Electrically Coupled MEMS Bandpass Filter,” Proc. IEEE International Micro Electro Mechanical Systems Conference (MEMS‘03), Kyoto, Japan, Jan. 2003, pp. 702-705.
16
S.Y. No, A. Hashimura, S. Pourkamali, and F. Ayazi, “Single-Crystal Silicon HARPSS Capacitive Resonators with Submicron Gap-Spacing,” Tech. Dig. Solid-State Sensors, Actuators, and Microsystems Workshop, Hilton Head, SC, June 2002, pp. 281-284.
15
S.H. Lee, S. Min, D.S. Kim, S. Dalmia, W. Kim, V. Sundaram, S. Bhattacharya, G. White, F. Ayazi, J.S. Kenney, M. Swaminathan, and R. Tummala, “High Performance Spiral Inductors Embedded in Organic Substrates for SOP Applications,” in Dig. 2002 IEEE MTT-S International Microwave Symposium (IMS 2002), Seattle, WA, June 2002, pp. 2229-2232.  
14
S. Dalmia, F. Ayazi, M. Swaminathan, S.H. Min, S.H. Lee, W. Kim, D.S. Kim, S. Bhattacharya, V. Sundaram, G. White, and R. Tummala, “Design of Inductors in Organic Substrates For 1-3 GHz Wireless Applications,” in Dig. 2002 IEEE MTT-S International Microwave Symposium (IMS 2002), Seattle, WA, June 2002, pp. 1405-1408.  
13
D. Balaraman, S. Bhattacharya, F. Ayazi, and J. Papapolymerou, “Low Cost Low Actuation Voltage Copper RF MEMS Switches,” in Dig. 2002 IEEE MTT-S International Microwave Symposium (IMS 2002), Seattle, WA, June 2002, pp. 1225-1228.
12
S. Dalmia, J.M. Hobbs, V. Sundaram, M. Swaminathan, S.H. Lee, F. Ayazi, G. White, and S. Bhattacharya, “Design and Optimization of High-Q RF Passives on SOP-Based Organic Substrates,” in Proc. 2002 Electronic Components and Technology Conference, San Diego, CA, May 2002, pp. 495-503.  
11
S. Dalmia, S.H. Lee, S. Bhattacharya, F. Ayazi, and M. Swaminathan, “High-Q RF Passives on Organic Substrates Using a Low-Cost Low-Temperature Laminate Process,” in Proc. 2002 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP 2002), Cannes, France, May 2002, pp. 660-669.
10
R. Tummala, S. Bhattacharya, S. Dalmia, P. M. Raj, T. Ogawa, S.H. Lee, R. Mani, D. Balaraman, A. Bavisi, F. Ayazi, M. Swaminathan, A. Erbil, “Recent Advances in Integral Passive Research at Georgia Tech,” in Proc. IMAPS 2002 International Conference on Electronic Packaging (ICEP), Tokyo, Japan, April 2002.  
9
S.Y. No and F. Ayazi, “The HARPSS Process for Fabrication of Nano-Precision Silicon Electromechanical Resonators,” Proc. IEEE 2001 Conf. on Nanotechnology (IEEE NANO’01), Maui, HI, Oct. 2001, pp. 489-494.
8
F. Ayazi, “High Aspect-Ratio Poly-Silicon MEMS Technology for Precision Inertial Sensors,” Invited Paper, Proc. 7th Mechatronics Forum International Conference, Atlanta, GA, Sept. 2000.  
7
F. Ayazi, H.H. Chen, F. Kocer, G. He, and K. Najafi, “A High Aspect-Ratio Polysilicon Vibrating Ring Gyroscope,” Tech. Dig. Solid-State Sensors & Actuators Workshop, Hilton Head, SC, June 2000, p. 289-292.  
6
F. Ayazi and K. Najafi, “High Aspect-Ratio Dry-Release Poly-Silicon MEMS Technology for Inertial-Grade Microgyroscopes,” Proc. IEEE 2000 Position Location and Navigation Symposium (PLANS 2000), San Diego, CA, March 2000, pp. 304-308.
5
D. Aslam, V. Papageorgiou, F. Ayazi, and K. Najafi, “IC-Compatible Technology of Poly-Diamond MEMS,” Proc. Sixth Annual Strategic and Technical Symposium "Vehicle Displays and Microsensors '99", Ypsilanti, MI, Sept. 1999, pp. 113-116.  
4
F. Ayazi, H.H. Chen, and K. Najafi, “A High Performance Vibratory Silicon Microgyroscope,” Proc. Sixth Annual Strategic and Technical Symposium "Vehicle Displays and Microsensors '99", Ypsilanti, MI, Sept. 1999, pp. 153-157.  
3
F. Ayazi and K. Najafi, “High Aspect-Ratio Polysilicon Micromachining Technology,” Proc. 10th Int. Conf. Solid-State Sensors and Actuators (Transducers’99), Sendai, Japan, June 1999, pp. 320-323.  
2
F. Ayazi and K. Najafi, “Design and Fabrication of a High-Performance Polysilicon Vibrating Ring Gyroscope,” Proc. IEEE International Micro Electro Mechanical Systems Conference (MEMS‘98), Heidelberg, Germany, Feb. 1998, pp. 621-626.
1
A. Selvakumar, F. Ayazi, and K. Najafi, “A High Sensitivity Z-Axis Torsional Silicon Accelerometer,” Tech. Dig. IEEE Int. Electron Devices Meeting (IEDM 1996), San Francisco, CA, Dec. 1996, pp. 765-768.  
     
     
     
     
Book Chapters
5
A. Sharma, M.F. Zaman, and F. Ayazi, “CMOS Systems and Interfaces for Microgyroscopes,” book chapter in Circuits at the Nanoscale: Communications, Imaging, and Sensing, pp. 601-622, 2008, Edited by K. Iniewski, CRC Press.
4
P. Monajemi, F. Ayazi, and D. Sparks, “MEMS Packaging,” in Introduction to System-on-Package (SOP), pp. 494-533, 2008, Edited by R. Tummala and M. Swaminathan, McGraw-Hill.
3
F. Ayazi, M.F. Zaman, A. Sharma, "Vibrating Gyroscopes," in Comprehensive Microsystems: Fundamentals, Technology and Applications, Vol. 2, pp 181-208, Edited by Y.B. Gianchandani, O. Tabata, and H. Zappe, Oxford, Elsevier Ltd.
2
F. Ayazi, “High-Frequency Integrated Micro-Electro-Mechanical Resonators and Filters,” book chapter in Advanced Micro and Nano Systems, Vol. 1, pp. 165-192, 2004, Edited by H. Baltes et al, Wiley-VCH.
1
R. Ramesham, R. Ghaffarian, and F. Ayazi, “Fundamentals of Microelectromechanical Systems (MEMS),” in Fundamentals of Microsystems Packaging, Ch. 14, pp. 542-579, Edited by R. Tummala, McGraw-Hill, 2001.
   
 
 
 
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