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| 1 |
Integrated Piezoelectric-On-Silicon Micromechamnical Oscillators (Sponsor: Integrated Device Technology Inc.)
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| 2 |
Intrinsically-Compensated Ultra-High-Q-Silicon Resonators (Sponsor: National Science Foundation) |
| 3 |
Silicon Bulk Acoustic Wave Timing and Inertial Measurement Unit (Sponsor: DARPA) |
| 4 |
3D MEMS for Micro Rate Integrating Gyroscropes (Sponsor: DARPA, as a subcontract to Northrop Corp.) |
| 5 |
Self-Calibrated MEMS Gyro-Compass (Sponsor: DARPA) |
| 6 |
Reconfigurable RF Filters (Sponsor: National Science Foundation) |
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