IMEMS Group

●    High Frequency Integrated Micro and Nano Electro-Mechanical Resonators and Coupled Resonator Systems

    ▪    Source of Support: DARPA, NSF, Sandia National Lab, Industry

●    Low-Noise and Low-Power Mixed Signal Interface IC's for MEMS

    ▪    Source of Support: NSF, NASA, Industry

●    Integrated Tactical and Inertial Grade Resonating Micro-Gyroscopes

    ▪    Source of Support: DARPA

●    Integrated Micro and Nano-Gravity Accelerometers

    ▪    Source of Support: NASA, NSF, DARPA

●    Low-Loss Integrated Silicon Platforms for high-Q RF MEMS

    ▪    Source of Support: NSF

●    Low-Temperature Integrated MEMS and NEMS Packaging

    ▪    Source of Support: NSF, Industry