Welcome to the website of Prof. Farrokh Ayazi's research group in the School of Electrical and Computer Engineering at the Georgia Institute of Technology. The Integrated MEMS Group is a unit member of the Center for MEMS and Microsystems Technologies (CMMT) at Georgia Tech.
IMEMS Research relates to the design, analysis, fabrication and characterization of Micro and Nano Electro-Mechanical Systems (MEMS and NEMS), with a focus on high Q resonators and resonant gyroscopes. High Q resonators have applications in 'mixed-domain microsystems' such as gyroscopes and accelerometers, low jitter clocks, energy harvesters, biochemical sensors for health and environmental monitoring, as well as wireless communications. On the system side, the group specializes on advance interface circuits and architectures for MEMS and Sensors.