Welcome to the website of Prof. Farrokh Ayazi's research group in the School of Electrical and Computer Engineering at the Georgia Institute of Technology. The Integrated MEMS group encompasses a number of projects related to the design, fabrication, test and packaging of MEMS (Micro Electro-Mechanical Systems) for communication and sensory applications, implemented using the System-On-a-Chip (SOC) and/or System-On-a-Package (SOP) approaches.

The Integrated MEMS Group is a unit member of the Center for MEMS and Microsystems Technologies (CMMT) at Georgia Tech.

150MHz Side-Supported Si Disk Resonator, Q=45,000

Switched-capacitor charge amplifier in 2.5V 0.25um CMOS

Resonant Micro-Gyroscope