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Georgia Tech Integrated MEMS

 

Welcome to the website of Prof. Farrokh Ayazi's research group in the School of Electrical and Computer Engineering at the Georgia Institute of Technology. The Integrated MEMS group encompasses a number of projects related to the design, fabrication, test and packaging of MEMS (Micro Electro-Mechanical Systems) for communication and sensory applications, implemented using the System-On-a-Chip (SOC) and/or System-On-a-Package (SOP) approaches.

The Integrated MEMS Group is a unit member of the Center for MEMS and Microsystems Technologies (CMMT) at Georgia Tech.

 

 

150MHz Side-Supported Si Disk Resonator, Q=45,000

Switched-capacitor charge amplifier in 2.5V 0.25um CMOS

Resonant Micro-Gyroscope

 

 

This website has been visited times since March 16, 2007